Welcome to ISTC/CSTIC 2009. ISTC/CSTIC (CISTC from 2010 and beyond) is an annual semiconductor technology conference organized by SEMI and ECS, co-organized by China's High-Tech Expert Committee (CHTEC). It is co-sponsored by IEEE-EDS and China Electronics Materials Industry Association. ISTC/CSTIC 2009 will be held on March 19 to 20, 2009 in Shanghai, China, in conjunction with SEMICON China 2009. It will cover all the aspects of semiconductor technology and manufacturing, including devices, design, lithography, integration, materials, processes, manufacturing as well as emerging semiconductor technologies and silicon material applications. ISTC/CSTIC 2009 was merged by ISTC (International Semiconductor Technology Conference) and CSTIC (China Semiconductor Technology International Conference), the two industry leading technical conferences in China and consists of one plenary session and nine technical symposia. It will be the eighth international conference since the 1^st ISTC on 2001.