| |
ISTC/CSTIC 2009 COMMITTEE
|
|
CONFERENCE CHAIR AND CO-CHAIRS |
 |
Dr. David HUANG
Chairman
Praxair Inc., USA |
| |
|
|
Dr. Hanming WU
Co-chair
SMIC, China |
| |
|
|
Dr. Qinghuang LIN
Co-chair
IBM, USA |
| |
|
|
Dr. Cor CLAEYS
Co-chair
IMEC, Belgium |
| |
|
|
Mrs. Ying SHI
Co-chair
Gritek,China |
INTERNATIONAL ADVISORY COMMITTEE MEMBERS |
 |
Dr. Minhwa CHI
Member
SMIC, China |
| |
|
|
Dr. Qingyuan HAN
Member
Hans Consulting International, USA |
| |
|
| |
Dr. Hiroshi IWAI
Member
Tokyo Institute of Technology, Japan |
| |
|
| |
Dr. Swami MATHAD
Member
Tech. USA |
| |
|
|
Dr. Ara PHILLIPOSSIAN
Member
University of Arizona, USA |
| |
|
|
Mr. Ray ROBERGE
Member
Praxair, USA |
| |
|
| |
Dr. Farhang SHADMAN
Member
University of Arizona, USA |
| |
|
|
Dr. Hsing-Huang TSENG
Member
FEOL Division, SEMATECH |
| |
|
| |
Dr. Ming YANG
Member
IC Spectrum, China |
| |
|
|
Dr. Steve YANG
Member
GSMC, China |
| |
|
| |
Dr. Shichang ZOU
Member
Chinese Academy of Sciences, China |
SYMPOSIUM I: DESIGN AND DEVICE ENGINEERING |
 |
Dr. Ru HUANG
Chairwoman
Peking University, China |
| |
|
|
Dr. Shaoning MEI
Co-Chair
HHNEC, China |
| |
|
|
Dr. Boyong HE
Co-Chair
Shanghai Jiaotong University, China |
| |
|
|
Dr. Huiling SHANG
Member
IBM, USA |
| |
|
|
Dr. Hong WU
Member
SST, China |
SYMPOSIUM II: METROLOGY, RELIABILITY AND TESTING |
 |
Dr. Peilin SONG
Chairman
IBM, USA |
| |
|
|
Dr. Wen-li WU
Co-Chair
NIST, USA |
| |
|
|
Dr. Yuhua CHENG
Co-Chair
Peking University, China |
| |
|
| |
Dr. Srinivas RAGHVENDRA
Member
Synopsys, USA |
| |
|
|
Dr. Timmy BAO
Member
Veeco, USA |
| |
|
|
Dr. Gao TENG
Member
IMEC, China |
| |
|
|
Dr. Francis JEN
Member
KLA Tencor, China |
SYMPOSIUM III: NEW MATERIALS AND PROCESS INTEGRATION |
|
Dr. Hanming WU
Chairman
SMIC, China |
| |
|
|
Dr. Youfan LIU
Co-Chair
Intel USA |
| |
|
|
Dr. Sowmya KRISNAN
Co-Chair
Ultra Clean Technology, USA |
| |
|
|
Dr. Chimin SHEU
Member
Air Products, China |
| |
|
|
Dr. Ran LIU
Member
Fudan University, China |
SYMPOSIUM IV: PHOTOLITHOGRAPHY |
 |
Dr. Ken WU
Chairman
ASML, China |
| |
|
|
Dr. Kafai LAI
Co-Chair
IBM, USA |
| |
|
|
Dr. Shuji DING
Co-Chair
Rohm & Haas Microelectronics Technologies, China |
| |
|
|
Dr. Curtis LIANG
Member
ASML, China |
| |
|
| |
Prof. Zewen LIU
Member
Tsinghua University, China |
| |
|
| |
Dr. Zhibiao MAO
Member
Toppan, China |
| |
|
| |
Mr. Oliver LI
Member
Intel |
| |
|
| |
Dr. Gary ZHANG
Member
Rohm&Haas |
| |
|
|
Dr. Steven LOWDER
Member
Brewer Science, Inc. |
SYMPOSIUM V: CMP & CLEANING |
 |
Dr. Chris YU
Chair
Anji Microelectronics, China |
| |
|
|
Dr. Charles XING
Co-Chair
SMIC,China |
| |
|
|
Dr. Jingxun FANG
Co-Chair
HHNEC, China |
| |
|
| |
Dr. Yuling LIU
Member
Hebei University of Technology, China |
| |
|
|
Dr. Kuochun WU
Member
Cabot Microelectronics, Asia |
| |
|
| |
Dr. Christine YE
Member
Rohm & Haas Electronic Materials, USA |
| SYMPOSIUM VI: THIN FILM, ETCH AND PLATING |
 |
Dr. WeiE WANG
Chairman
Intel, Belgium |
| |
|
|
Dr. Zhen GUO
Co-Chair
Intel |
| |
|
|
Dr. Jason TIAN
Member
Nikon, China |
| |
|
| |
Mr. Canyuan WANG
Member
TEL Shanghai, China |
| |
|
|
Dr. Ying ZHANG
Member
IBM,USA |
| |
|
| |
Dr. Jerry XU
Member
Applied Materials, China |
SYMPOSIUM VII: PACKAGING TECHNOLOGY |
 |
Dr. Tom JIANG
Chairman
Micron, USA |
| |
|
| |
Dr. Qunce FU
Member
AP Marketing Communications Manager,Henkel |
| |
|
|
Dr. Ricky S W LEE
Member
Hong Kong University of Science and Technology, China |
| |
|
| |
Daniel LU
Member
Sr. Technical Manager, Henkel |
SYMPOSIUM VIII: EMERGING SEMICONDUCTOR TECHNOLOGIES |
|
Dr. Qinghuang LIN
Chairman
IBM, USA |
| |
|
|
Dr. Jia CHEN
Co-Chair
IBM, USA |
| |
|
|
Dr. Fuhua YANG
Member
Institute of Semiconductor, Chinese Academy of Sciences, China |
| |
|
|
Dr. Jie ZHANG
Member
Motorola, USA |
| |
|
|
Dr. Hyungjun KIM
Member
Pohang University of Science and Technology, South Korea |
| |
|
|
Dr. Jinn P. CHU
Member
National Taiwan University of Science and Technology, China |
| |
|
|
Dr. Wang YUEH
Member
Intel |
SYMPOSIUM IX: SILICON TECHNOLOGY FOR SEMICONDUCTOR, ELECTRONIC AND SOLAR APPLICATIONS |
 |
Dr. Milind KULKARNI
Chairman
MEMC, USA |
| |
|
|
Dr. Renhe JIA
Co-Chair
Applied Materials, USA |
| |
|
|
Dr. David HUANG
Co-Chair
Praxair Inc., USA |
| |
|
|
Dr. Deren YANG
Member
Zhejiang University, China |
| |
|
|
Mrs. Ying SHI
Member
Gritek,China |
|
